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Instrument

Hot Plate with Precisely Control System

Ozone Etcher

Ion Etcher 

High Vacuum Evaporator

High Vacuum Evaporator

High Vacuum Evaporator

Chamber for UV Irradiation

國立中山大學 材料與光電科學學系
Department of Materials and Optoelectronic Science
National Sun Yat-sen University

Kaohsiung, 804, Taiwan, R.O.C. 

Tel : 886-7-5252000 ext. 4051 

Fax : 886-7-5254099

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