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Instruments
Transmission Electron Microscope for Soft Matter (JEOL JEM-2100)
•Accelerating voltage: 80-200 kV
•Magnification: 100-1,000,000 X
•Point resolution: 0.14 nm
•Tilting angle: X:±40°; Y:±30°
•High tilt specimen retainer: X:±80°
High-Resolution Scanning Electron Microscope (Gemini 450)
•Accelerating voltage: 0.02~30 kV
•Magnification: 12-2,000,000 X
•Resolution: SE: 0.7 nm @ 15 kV, 1.1 nm @ 1kV / 500V
1.5 nm @ 200V
•Resolution: BSE: 1.2 nm @ 1 kV
Cryo Laser FIB SEM (Gemini 550)
•Accelerating voltage: 0.02~30 kV
•Magnification: 12-2,000,000 X
•Resolution: SE: 0.9 nm @ 15 kV, 1.8 nm @ 1kV
•Resolution: BSE: 1.2 nm @ 1 kV
• Ga+ ion beam: Current: 1pA~100nA
• femtosecond Laser: wavelength=515nm for High Speed Large Cross-Sections
• Cryo Stage: Temperature RT~-190oC
• Slice and View SEM for 3D Tomography
RT & Cyro Ultramicrotome (Leica EM UC7 &UC6)
Hot Plate with Precisely Control System
Ozone Etcher
Ion Etcher
High Vacuum Evaporator
High Vacuum Evaporator
High Vacuum Evaporator
Chamber for UV Irradiation
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